Tempe™ & Eon™ – Heat Control for more efficient ALD

Tempe-Eon™
Tempe-Eon™ System: High-Temp Measurement & Control for ALD


With a self-heating sensor head, the Tempe-Eon™ system can achieve and maintain any temperature within a range of 40-500°C for high resolution, real-time in-situ ALD process monitoring and control

Bookmark the permalink.