Helios™ Hermetically-Sealed 300°C Crystal Sensor
The Helios™ system performs in conditions where standard crystal thickness monitors fail due to excessive temperatures or electrical short circuits. It is specifically designed for thin film coating process control when high chamber temperatures and high vapor pressure evaporants (or gases) are present. This includes:
- Selenization of CIGS films
- Atomic Layer Deposition (ALD)
- Chemical Vapor Deposition (CVD)
- Organic Vapor Phase Deposition (OVPD or MOCVD)
Capable of operation to 300ºC, the Helios™ system is a sealed and heated crystal sensor housing combined with an advanced quartz crystal, the RC™. Deposition gases or materials do not permeate and contaminate the contact electrodes responsible for driving and reading the sensor when the crystal is sealed. Gaseous precursors can pyrolyze and deposit on the crystal surface, when the sensor is heated, enabling thickness measurement.
Regeneration is an important feature of the Helios for continuous (inline) deposition systems. The heater can be used, for materials that evaporate at < 300°C, to re-evaporate the film of the crystal surface and the crystal to be re-used a near infinite number of times. This is especially valuable for selenium deposition systems.
Features
- Sealed, temperature-controlled sensor head, suitable for one crystal, and complete with heater, air-cooling lines (up to 30″ long), and embedded type K thermocouple
- 2.75″ ConFlat™ vacuum flange, with air lines, electrical connections for heater, crystal cable, and thermocouple
- Eon™ freestanding film thickness controller with integrated temperature measurement and heater control. The Eon™ has an RS232 communications output, and it reports rate, thickness, sensor temperature, and heater output to a PC-based computer system (PC not included)
- All connecting cables, LabView™ based software, and an instruction manual
For additional information, refer to the following datasheets:
Helios™ Datasheet
Eon™ Datasheet
High Temperature (HT™) Crystals Datasheet
