Hardware

Tempe™ Self-Cleaning Sensor Head

  • Temperature controlled sensor head, complete with heater, air-cooling lines (up to 32” long), and embedded RTD (optional shutter if required, although maximum temperature will be limited to 250°C)
  • 2.75” ConFlat™ vacuum flange with electricals for heater, RTD, crystal control, air lines for cooling, and optional shutter air
  • Simple PC based integration with the Eon™, high resolution controller with built-in heater control and measurement of temperature, rate, thickness, and frequency (PC not included)
  • Integration with Mirage™ Air-Cooling System capable of an output up to 28º C (50º F) below the supply air temperature
  • Tempe™ System inclues all necessary hardware, software, and documentation for plug and play capability

 

 Helios™ Sensor Head

  • Sealed, temperature –controlled sensor head, complete with heater, air cooling lines (up to 30” long), and embedded RTD
  • 2.75” ConFlat™ vacuum flange with air lines, electrical connections for heater, crystal cable, and RTD
  • Integration with high resolution Eon™ Film Thickness Controller with built-in heater control and measurement of temperature, rate, thickness, and frequency on a PC-based computer system (PC optional accessory)
  • Integration with Mirage™ Air-Cooling System capable of an output up to 28º C (50º F) below the supply air temperature
  • Total package includes all connecting cables, LabView™ based software, quick-start guides, and instruction manuals

 

Infinity-12™ Sensor Head

  • Maximizes process uptime (up to 100 hours for Infinity-12™ and 200 hours for Infinity-24™
  • Crystal rotation uses robust, automatic switching and individual position detection for solid reliability
  • Front-loading, quick release carousel with deposition shield for reliable protection from deposition and fast replacement of all 12 crystals
  • Additional carousels available for instantaneous, cartridge style crystal replacement
  • Custom mounting available

 

 Phoenix™ Sensor Head  

  • Temperature measuring quartz crystal sensor head, single or dual versions
  • Embedded type K thermocouple
  • Designed for 14 mm diameter crystals, up to 10 MHz operation
  • Available with 2.75 Conflat™ or 1” bolt feed through as stock configuration. Length 30” (75 mm). Custom sizes, flanges and bends available. Also available with compression fittings to allow infinite length adjustability.
  • Standard SMA air side connection for crystal measurement. Compatible with the Eon-LT™ or other film thickness monitors and controllers