Helios™ Hermetically-Sealed 300°C Crystal Sensor
The Helios™ system performs in conditions where standard crystal thickness monitors fail due to excessive temperatures or electrical short circuits. It is specifically designed for thin film coating process control when high chamber temperatures and high vapor pressure evaporants (or gases) are present.
Tempe™ Sensor Heads (Single only)
The Tempe™ system is designed for thin film coating process control when high stress dielectrics (TiO2, SiO2, MgF2, etc) are being measured. These cause excessive rate noise and lead to significant errors with process control. Colnatec keeps the sensor below 100ºC, however, because there is still a need for cooling, given the high process heat during thermal evaporations.
Oasis™ Dual or Single Sensor Head
The Oasis™ sensor head embodies a revolutionary approach to quartz crystal film thickness monitoring. A crystal is traditionally water-cooled to minimize the natural frequency vs. temperature behavior. The “theory” is that this variation adds an error to the thickness measurement.
Lipstick™ Sensor Head
The Tempe™ sensor is also available in a miniaturized single-head version, called the Lipstick™. It comes standard with all the same features and benefits of a Tempe™ but is intended for extremely tight spaces.
