Tempe™ Sensor Head
The Tempe™ system is designed for thin film coating process control when high stress dielectrics (TiO2, SiO2, MgF2, etc) are being measured. These cause excessive rate noise and lead to significant errors with process control. Colnatec keeps the sensor below 100ºC because there is still a need for cooling, given the high process heat during thermal evaporations.
Infinity™ 12 Sensor Head
The Colnatec Infinity™12 is a 12-position quartz crystal sensor head for high vacuum thin
film deposition. Infinity™ 12 uses an internal stepper motor system, avoiding the unreliable technology of pneumatic drives. The Infinity™ 12 has a water-cooled sensor housing that keeps the crystal at the optimum operating temperature range and also keeps the stepper motor in the correct temperature range.
Helios™ Hermetically-Sealed 300°C Crystal Sensor
The Helios™ system performs in conditions where standard crystal thickness monitors fail due to excessive temperatures or electrical short circuits. It is specifically designed for thin film coating process control when high chamber temperatures and high vapor pressure evaporants (or gases) are present.
Oasis™ Dual or Single Sensor Head
The Oasis™ sensor head embodies a revolutionary approach to quartz crystal film thickness monitoring. A crystal is traditionally water-cooled to minimize the natural frequency vs. temperature behavior. The “theory” is that this variation adds an error to the thickness measurement.