Colnatec Eon™ PC-Based Film Thickness Controller
The World’s Only Temperature-Controlling Film Thickness Monitor
The world is changing to one where networks can connect everything. Why not your film thickness monitor? To achieve this goal, others have developed simple, modified oscillators that attach to the crystal feedthrough and supply digital datato a personal computer. Colnatec takes a much different approach and offers a unit that
is superior to even the best stand alone crystal monitors. Our groundbreaking Eon™ does everything a standard film thickness monitor can and more: real-time temperature measurement, heater control, real-time frequency vs. temperature correction, and crystal resistance.By adding temperature control capability, our software can correct for crystal heating via a pre-loaded frequency vs. temperature curve, ensuring the ultimate in film thickness accuracy. Combined with our RC™ crystals, a major contributor to erratic crystal performance—crystal stress—is eliminated. This leads to the highest accuracy, most stable, and longest life thin film thickness sensor ever created.
Real-time crystal resistance measurement puts the Eon™ in a class by itself. Instead of displaying a derived and often meaningless measurement of the crystal “health”, we monitor the current that drives the crystal during oscillation. As this current decreases, the potential for crystal failure increases, but in a non-linear fashion. Since failure is specific to materials and coating conditions, the Eon™ allows users to create their own predictive algorithms for crystal lifetime and crystal change-out.
Easily adapted to your deposition control system, our software is LabView™ based and open for modification. No proprietary and awkward software here! We want your process to be seamless and trouble-free, not an exercise in fitting a square peg into a round hole.
Features
- The World’s first real-time frequency vs. temperature correction capability
- Temperature-measuring and -controlling crystal oscillator capable of driving a single crystal sensor
- PID-emulated programmable temperature control
- Shutter on/off support
- Heater status indicator on unit and in software
- Compatible with our 500°C Tempe™ and Oasis™ temperature-controlled crystal sensor heads
- Communicates with user-designed or Colnatec LabView™ software
- >Infinitely expandable system: hundreds of Eons™ can be networked
- All connecting cables, software and instruction manual included
For additional information, refer to the following datasheets:
Eon™ Datasheet
