World’s Most Economical Film Thickness Monitor
Temperature Measuring Monitor
First, Colnatec changed the level of dependability and precision in thin film deposition with the Tempe™Hot Sensor System. Then, after receiving feedback that not every customer requires process or temperature control, Colnatec designed a monitor with the same level of innovation and excellence as the Eon™ Film Thickness Controller, but stripped it to the bare essentials to provide a more compact unit at a lower price point. Welcome to the Eon-LT™ PC-Based Film Thickness Monitor.
Just like its older brother Eon™, Eon-LT™ is a temperature measuring film thickness monitor. This surpasses conventional monitors that are blind to thermal changes of the crystal. The combination of frequency and temperature measurement allows unprecedented accuracy in real-time rate and film thickness monitoring.
Why measure temperature? Because the frequency change of a crystal by process heating can easily be equal to the frequency change caused by coating. In normal operation there is a built-in 10% error in most rate measurements. In the worst case it can be 100%. Why measure if your measurements are always wrong?
While Eon-LT™ Monitor is compatible with industry standard crystal sensors, it was also specifically created to be paired with Colnatec’s Phoenix™ in combination with AT and RC™ 6 MHz crystals for a degree of precision never before imagined in the world of thin film.
EonLT™ vs Inficon Q-Pod™ Datasheet